Microsystem Technologies

Microelectromechanical system, MEMS (also known as microsystem technology), field is very exciting to many people. MEMS is a device that integrates machine element parts, sensors, actuators, and electric circuits on one silicon substrate, etc. In order to design a MEMS device successfully, an appreciation for the full spectrum of issues must be considered. The designer must understand:

• Fabrication technologies.
• Relevant physics for a device at the micron scale.
• Computer-aided design issues in the implementation of the design.
• Engineering of the MEMS device.
• Evaluation testing of the device.
• Reliability ad packaging issues necessary to produce a quality MEMS product.
  

More information at: https://www.epfl.ch/labs/lmis2/

I am taking part in a course about these issues:

1^st-6^th sessions: introduction, substrates, thin films, photolitography.
7^th-8^th sessions: bonding techniques.
9^th-11^th sessions: surface-patch techniques.
12^th-13^th sessions: encapsulation.
14^th-15^th sessions: nanotechnology.
16^th-18^th sessions: devices and applications.
19^th session: market.
20^th session: bioMEMS.

The following pictures show the clean room at the CEIT-IK4 centre.